Heterodyne interferometric measurement device for measuring surface shapes, has a modulation interferometer that is configured in conjunction with light frequency displacement devices

摘要

Heterodyning interferometric measurement device for measuring the shape of or the distances to surfaces. Said device has a coherent light source (LQ) with a modulation interferometer (MI) that is configured so that in conjunction with devices (AOM1, AOM2) for light frequency displacement, at least two combinations of wavelength difference and a frequency displacement can be formed and assigned to different measurement channels with special outputs (SO).