| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating the characteristics of an organometal compound in an actual use and the reactivity, thermal stability and pyrolyzing characteristics in an environment wherein the organometal compound and a reaction gas are allowed to coexist directly. SOLUTION: In this method for evaluating the organometal compound, an organometal compound raw material for use in forming a membrane by chemical vapor deposition is evaluated by a differential scanning calorimetric method. COPYRIGHT: (C)2005,JPO&NCIPI
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