| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing tantalum carbide capable of easily forming a tantalum carbide having a required shape and a uniform thickness when tantalum carbide is used for coating the surface of an article, which is not peeled off by a thermal history, tantalum carbide obtained by the method, and wiring lines and electrodes of tantalum carbide. <P>SOLUTION: The tantalum carbide is formed on the surface of tantalum or a tantalum alloy by placing the tantalum or the tantalum alloy in a vacuum heat treatment furnace, heat-treating the tantalum or the tantalum alloy under a condition where a natural oxide film of Ta<SB>2</SB>O<SB>5</SB>is sublimated and removed, introducing a carbon source into the vacuum heat treatment furnace, and then heat-treating. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
