摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means capable of controlling PM adhesion position in an honeycomb structure body while maintaining potential difference between electrodes suitable for plasma generation. <P>SOLUTION: Potential of a center electrode 30 is made variable while maintaining potential difference between the center electrode 30 and an outer circumference electrode 20 at a predetermined target value. Adhesion position of PM in the honeycomb structure body 40 can be freely controlled while suitably generating plasma by maintaining potential difference between the center electrode 30 and the outer circumference electrode 20 at potential difference suitable for generation of plasma. <P>COPYRIGHT: (C)2005,JPO&NCIPI |