发明名称 Thin film transistor with self-aligned intra-gate electrode
摘要 A thin film transistor for use in an active matrix liquid crystal display includes a substrate, a source and a drain regions, and at least a gate electrode. The substrate includes therein a plurality of intrinsic regions, at least one first doped region and two second doped regions. The first doped region is disposed between the plurality of intrinsic regions. The plurality of intrinsic regions are linked together to form a connection structure via the first doped region, and the two second doped regions are disposed at both ends of the connection structure, respectively. The source and the drain regions are coupled to the two second doped regions disposed at both ends of the connection structure, respectively. The gate electrode is disposed over the plurality of intrinsic regions, such that the periphery of each of the plurality of intrinsic regions and the periphery of a corresponding gate electrode are substantially aligned with each other.
申请公布号 US2005056838(A1) 申请公布日期 2005.03.17
申请号 US20040869210 申请日期 2004.06.16
申请人 TSAI YAW-MING;HSIEH HSIU-CHUN;CHANG SHIH-CHANG;HUANG CHEN-TING;WU I-WEI 发明人 TSAI YAW-MING;HSIEH HSIU-CHUN;CHANG SHIH-CHANG;HUANG CHEN-TING;WU I-WEI
分类号 H01L29/423;H01L29/786;(IPC1-7):H01L29/04 主分类号 H01L29/423
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