| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement-measuring device which can be improved in measurement accuracy, while being microminiaturized in size. SOLUTION: In this displacement-measuring device, a read head device 20 optically detects relative displacement with a scale 90. Since filtering of scale light, containing a scale grid pattern image performed by a phase mask 120 having a light shielding-featured periodic structure, enables acquisition of more detailed information on the relative displacement, measurement accuracy can be improved. Further as light-receiving fiber optics 130A-C are provided, instead of electronic photodetectors in conventional displacement-measuring devices to acquire information on the relative displacement, eliminating the need for a large number of circuit elements required formerly, in relation to the electronic photodetector, to significantly reduce number of component parts, therefore the device can be microminiaturized in size. COPYRIGHT: (C)2005,JPO&NCIPI
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