| 摘要 |
PROBLEM TO BE SOLVED: To provide an excellent ceramic heater having a small temperature difference in a wafer surface within±0.3°C. SOLUTION: This ceramic heater is equipped with a strip-shaped resistance heating element on the surface of a plate-like ceramic body, and has a group comprising a plurality of grooves nearly parallel with the longitudinal direction of the strip of the resistance heating element and having lengths equivalent to one another, and the group is located at the center of the width of the strip of the resistance heating element. COPYRIGHT: (C)2005,JPO&NCIPI
|
