| 摘要 |
A nitrogen-filling system is provided. A nitrogen-filling system includes a carrier including a main body for carrying at least one wafer box having at least a wafer, and a closing cover mounted on the carrier main body so as to formed a closed space around the wafer box, and a transporting vehicle for carrying the carrier and a nitrogen-filling apparatus set there on for filling the closed space with nitrogen so as to enhance a stability of the wafer in the carrier.
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