发明名称 POLYAMIDE RESIN AND POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION COMPRISING IT, SEMICONDUCTOR DEVICE AND DISPLAYING ELEMENT USING THEM, AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE AND DISPLAYING ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a polyamide resin excellent in resistance to hydrofluoric acid for the purpose of producing either a polybenzoxazole resin or a polyimide resin, or a copolymer resin of both resins, to provide a positive type photosensitive resin composition excellent in developing characteristics using the polyamide resin, to provide a semiconductor device and a displaying element and to provide a process for producing the semiconductor device and the displaying element. <P>SOLUTION: The polyamide resin is a polyamide resin (A) which has a structure represented by formula (1) wherein 0.1-30 mol% of the total amount of Y in formula (1) is constituted of a structure represented by formula (2). The photosensitive resin composition comprising the polyamide resin is provided and the semiconductor device using the polyamide resin and the photosensitive resin composition is provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005068419(A) 申请公布日期 2005.03.17
申请号 JP20040228873 申请日期 2004.08.05
申请人 SUMITOMO BAKELITE CO LTD 发明人 BANBA TOSHIO;HIRANO TAKASHI
分类号 G03F7/023;C08G69/42;C08K5/13;C08K5/23;C08L77/06;H01L21/027;H01L23/29;H01L23/31 主分类号 G03F7/023
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