| 摘要 |
PROBLEM TO BE SOLVED: To provide a slide assembly, which is small and rapidly movable, in a stage of lithographic equipment. SOLUTION: A stage, which moves over a table, has a region 105 that generates repellent force, and a region 115 that generates sucking force at a central portion of the repellent-force generating region 105. A hole array 116 for supplying air is formed in the repellent-force generating region, and a magnet array is formed in the suction-force generating region 115, so that a fixed interval is formed between the table and the stage. COPYRIGHT: (C)2005,JPO&NCIPI
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