SURFACE STATE MEASURING METHOD OF SURFACE PROCESSED PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide a surface state measuring method of a surface processed product which enables an evaluation of the surface state of the surface processed product in a non-destructive state. SOLUTION: The surface of an object 1 to be measured is irradiated with a pressure wave 4 so as to generate a Rayleigh wave 4b in the vicinity of the surface of the object 1 and the reflected wave 5 from the surface irradiated with the pressure wave 4 of the object 1 is detected while the leakage wave 7 from the object 1 based on the Rayleigh wave 4b is detected. The thickness of the crack layer 1a of the object 1 is measured on the basis of the reflected wave 5 and the leakage wave 7. COPYRIGHT: (C)2005,JPO&NCIPI