| 摘要 |
There is provided a compact, high-sensitivity acceleration sensor. The acceleration sensor includes a weight 8, a pedestal 9 arranged around the periphery of the weight 8, a support frame 3 formed to have a width narrower than the width of the pedestal 9 all around its perimeter, a mass 2 attached to the weight 8 to retain the weight 8 inside the support frame 3, beams 4 connecting the support frame 3 and the mass 2 and overlapping the pedestal 9 near their ends on the side of the support frame 3, and a peripheral interlayer 12 arranged between the support frame 3 and the pedestal 9 to create a predetermined clearance between the pedestal 9 and the parts of the beams 4 that overlap the pedestal 9. |
