METHOD AND APPARATUS FOR PRODUCING EXTREME ULTRAVIOLETT RADIATION OR SOFT X-RAY RADIATION

摘要

A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced. In order to provide a method of the abovementioned type which is free of the disadvantages of the prior art and at the same time allows greater radiation power without high electrode wear, it is proposed that said gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).