发明名称 UNIPOLAR ELECTROSTATIC QUADRUPOLE LENS AND SWITCHING METHODS FOR CHARGED BEAM TRANSPORT
摘要 The present invention mitigates loss of beam current, particularly for low energy ion beam transport. The present invention employs unipolar electrostatic quadrupole lenses instead of conventional dual positive and negative potential (bipolar) quadrupole lenses as beam focusing elements within a linear accelerator, reducing beam current losses therein. In addition, the present invention also includes systems and methods for switching between bipolar wiring and unipolar wiring.
申请公布号 WO2005024911(A2) 申请公布日期 2005.03.17
申请号 WO2004US28656 申请日期 2004.09.02
申请人 AXCELIS TECHNOLOGIES INC.;DIVERGILIO, WILLIAM;HUANG, YOUNGZHANG 发明人 DIVERGILIO, WILLIAM;HUANG, YOUNGZHANG
分类号 H01J37/12;H01J37/153;H01J37/317 主分类号 H01J37/12
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