| 发明名称 |
Wafer-handling device for laying in and transporting fragile objects like thin wafers has a transporting container and a supporting plate |
| 摘要 |
<p>Lodged free from rigid inflexible contacts in a transporting container (1) exclusively by means of absorbent elements (8) formed by elastomer spiral springs, a supporting plate (4) has a box (5) fastened on it to hold thin wafers.</p> |
| 申请公布号 |
DE10337570(A1) |
申请公布日期 |
2005.03.17 |
| 申请号 |
DE2003137570 |
申请日期 |
2003.08.14 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
KOBLINSKI, CARSTEN VON;MAUNZ, INGOMAR;MATSCHITSCH, MARTIN;HOHENWARTER, ERWIN;ZEBEDIN, WERNER;MICHENTHALER, NORBERT |
| 分类号 |
B65D81/07;B65D85/90;H01L21/673;H01L21/68;(IPC1-7):B65D81/07 |
主分类号 |
B65D81/07 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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