| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a perpendicular magnetic recording head which can converge magnetic fields generated from the perpendicular magnetic recording head effectively, and set a practical record track width in a fixed extent easily. SOLUTION: Utilizing the difference of speeds of scraping a main pole layer 29 and a nonmagnetic layer 31 by dry etching, a groove G composed of inside faces 31b and 31b of a first nonmagnetic layer 31 and a top face 29a of the main magnetic pole layer 29 is formed, and an auxiliary magnetic pole layer 33 is formed on the groove G via a nonmagnetic material layer 32. Therefore, a convex part 33b which is integrally formed together with the auxiliary magnetic pole layer 33 at the inside of the recess part 32a in the nonmagnetic material layer 32 prolonged in the direction of the main magnetic pole layer 29 can be easily formed. COPYRIGHT: (C)2005,JPO&NCIPI |
