发明名称 DRYER
摘要 PROBLEM TO BE SOLVED: To provide a dryer capable of drying objects to be dried within a short time in an energy saving state, simplifying maintenance, and preventing the object to be dried from being contaminated again. SOLUTION: The dryer comprises a processing tank having a hollow inside, carrying rollers arranged so as to be penetrated into the center part of the processing tank, and capable of continuously carrying objects to be dried from the entrance of the processing tank to the exit; halogen lamp heaters arranged on the upper part of the carrying rollers; and a radiation board arranged on the lower part of the carrying rollers. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005072442(A) 申请公布日期 2005.03.17
申请号 JP20030302658 申请日期 2003.08.27
申请人 SHIMADA PHYS & CHEM IND CO LTD 发明人 HONDA SATORU;HATAKE KAZUO;HAGIWARA TAKEHIRO;SUGIMOTO SHINGO;HORIIKE HIDEO
分类号 F26B3/30;F26B9/06;F26B15/12;H01L21/304;(IPC1-7):H01L21/304 主分类号 F26B3/30
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