摘要 |
The aim of the invention is to provide a holder for discoid substrates comprising an internal orifice, used in a coating device, said holder having a simple construction and ensuring that the substrates are retained securely. This is achieved by a holder for discoid substrates comprising an internal orifice, used in a coating device, that is equipped with a retaining element, which has a base and at least three spring-loaded arms that are configured as one piece with the base and that extend perpendicularly to a plane of the base. The free ends of the spring-loaded arms define a respective incline towards the exterior, said incline extending towards a central axis of the base and the respective spring-loaded arms define a substantially linear section in the axial direction in an area between the incline and the base. |
申请人 |
STEAG HAMATECH AG;LUKHAUB, WALDEMAR;PHILIPP, KLAUS;EISELE, GUENTER;WEIDNER, TIMO;RIESEWEBER, TILMAN;ZIMMERMANN, MANFRED |
发明人 |
LUKHAUB, WALDEMAR;PHILIPP, KLAUS;EISELE, GUENTER;WEIDNER, TIMO;RIESEWEBER, TILMAN;ZIMMERMANN, MANFRED |