发明名称 HOLDER FOR DISCOID SUBSTRATES COMPRISING AN INTERNAL ORIFICE
摘要 The aim of the invention is to provide a holder for discoid substrates comprising an internal orifice, used in a coating device, said holder having a simple construction and ensuring that the substrates are retained securely. This is achieved by a holder for discoid substrates comprising an internal orifice, used in a coating device, that is equipped with a retaining element, which has a base and at least three spring-loaded arms that are configured as one piece with the base and that extend perpendicularly to a plane of the base. The free ends of the spring-loaded arms define a respective incline towards the exterior, said incline extending towards a central axis of the base and the respective spring-loaded arms define a substantially linear section in the axial direction in an area between the incline and the base.
申请公布号 WO2005024812(A1) 申请公布日期 2005.03.17
申请号 WO2004EP09922 申请日期 2004.09.06
申请人 STEAG HAMATECH AG;LUKHAUB, WALDEMAR;PHILIPP, KLAUS;EISELE, GUENTER;WEIDNER, TIMO;RIESEWEBER, TILMAN;ZIMMERMANN, MANFRED 发明人 LUKHAUB, WALDEMAR;PHILIPP, KLAUS;EISELE, GUENTER;WEIDNER, TIMO;RIESEWEBER, TILMAN;ZIMMERMANN, MANFRED
分类号 G11B7/26;G11B17/022;G11B17/028;G11B23/00;G11B33/04 主分类号 G11B7/26
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