Motor control system and vacuum pump equipped with the motor control system

摘要

Disclosed are a motor control system capable of shortening the starting time of a turbo molecular pump and a vacuum pump equipped with the motor control system. A motor control system (600) is equipped with a motor temperature sensor (424) and an inverter temperature sensor (524). Detection signals from the motor temperature sensor (424) and the inverter temperature sensor (524) are input to a comparator (512) of a drive control circuit (510). In accordance with a characteristic curve and based on the temperatures detected by the motor temperature sensor (424) and the inverter temperature sensor (524), the comparator (512) sets, in a current adjustment circuit, a current value at continuous rating satisfying both motor windings (126U, 126V, and 126W) and inverter circuits (222) as the upper limit value of a motor current Im.