Method for removal of surface oxides by electron attachment
摘要
<p>The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate. <IMAGE></p>
申请公布号
EP1514627(A2)
申请公布日期
2005.03.16
申请号
EP20040009170
申请日期
2004.04.16
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
DONG, CHUN, CHRISTINE;MCDERMOTT, WAYNE, THOMAS;SCHWARZ, ALEXANDER;ARSLANIAN, GREGORY, KHOSROV;PATRICK, RICHARD, E.