Micro fabricated gyroscope with a double tuning fork

摘要

The gyrometer has four moving assemblies, each coupled to two moving assemblies located at neighboring vertices via a coupling structure. A detection mass (30) is connected to an anchoring zone (36) by two arms (44, 46) lying along the extension of one with the other on either side of the zone. A recess is provided in the mass around the zone. The length of the arms is 5 times greater than the width of the arms.