| 摘要 |
<p>A process for minimizing and even eliminating over-sized particles in a vapor phase synthesis of metal oxide-containing particles comprising reacting oxygen with one of more vapor streams comprising a titanium halide, a silicon halide and a compound selected from the group consisting of phosphorus, germanium, boron, tin, niobium, chromium, silver, gold, palladium aluminum, and mixtures thereof in a plug flow, plasma reactor. <IMAGE></p> |
