POLISHING COMPOSITION AND METHOD FOR FORMING WIRING STRUCTURE,申请号EP20030743592-传众专利搜索

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发明名称	POLISHING COMPOSITION AND METHOD FOR FORMING WIRING STRUCTURE
摘要
申请公布号	EP1489650(A4)	申请公布日期	2005.03.16
申请号	EP20030743592	申请日期	2003.03.04
申请人	FUJIMI INCORPORATED	发明人	OHNO, KOJI;HORIKAWA, CHIYO;SAKAI, KENJI;TAMAI, KAZUSEI;INA, KATSUYOSHI
分类号	C09G1/02;C09K3/14;H01L21/321;(IPC1-7):C09G1/02;B24B37/00;H01L21/304	主分类号	C09G1/02
代理机构		代理人
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