METHOD FOR DETECTING HEAT EMISSION SOURCES IN A SAMPLE OF LIQUID-CRYSTAL SUBSTANCE DESIGNED FOR MANUFACTURING SEMICONDUCTOR DEVICES

摘要

The proposed method for detecting heat emission sources in a sample of liquid-crystal substance designed for manufacturing semiconductor devices can be used in analyzing faults in electronic devices. The method consists in controlling the parameters of the transition from the transparent phase of the substance to the cholesteric phase in a thin layer of the cholesteric crystal. The local area of the cholesteric phase that is positioned over a heat emission source is viewed as a semi-transparent area on the background of the topological pattern of the crystal, if the superposition of the polarizers of the polarizing microscope is not present, and as brightly illuminated area on a dark background if the superposition of the polarizers is present. The present invention allows the functionality range of the method to be increased.