发明名称 |
Capacitive micro-electro-mechanical switch and method of manufacturing the same |
摘要 |
The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.
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申请公布号 |
US6867467(B2) |
申请公布日期 |
2005.03.15 |
申请号 |
US20020329390 |
申请日期 |
2002.12.27 |
申请人 |
ELECTRONICS AND TELECOMMUNICATION RESEARCH INSTITUTE |
发明人 |
YANG WOO SEOK;KANG SUNG WEON;KIM YUN TAE;JUNG SUNG HAE |
分类号 |
H01H59/00;H01P1/12;(IPC1-7):H01L29/82 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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