发明名称 Method for joining large substrates
摘要 A method for joining large area semiconductor substrates, a liquid thermoset polymer. Two large area substrates, such as wafers or circuit boards (e.g., rigid or flexible), can be joined together by dispensing a liquid polymer inwardly from the edges of the semiconductor substrates. The substrates can then be pressed together so that the liquid thermoset flows in an outwardly direction ward the edges of the semiconductor substrates. Conducting surfaces on the first and second substrates may contact each other after pressing the liquid thermoset polymer. The liquid thermoset polymer in the formed structure may then be cured to a hardened state. The liquid thermoset polymer preferable has a low viscosity, low levels of ionic contaminants, good adhesion to the substrates, low moisture absorbing properties and favorable thermal expansion properties.
申请公布号 US6866741(B2) 申请公布日期 2005.03.15
申请号 US20010757364 申请日期 2001.01.08
申请人 FUJITSU LIMITED 发明人 CHAN ALBERT W.;LEE MICHAEL G.;MCCORMACK MARK THOMAS;BEILIN SOLOMON I.
分类号 H01L21/60;B32B7/12;H01L21/58;H01L21/68;H05K3/34;H05K3/46;(IPC1-7):H01L21/46 主分类号 H01L21/60
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