发明名称 |
Piezoelectric filter, communication device, and method for manufacturing communication device |
摘要 |
A piezoelectric filter includes a plurality of piezoelectric resonator portions each having a substrate, an SiO2 layer, a piezoelectric thin-film, a lower electrode, and an upper electrode. The plurality of piezoelectric resonator portions include piezoelectric resonator portions having a relatively low frequency, and the lower electrodes of the piezoelectric resonator portions having a relatively low frequency have a thickness larger than that of lower electrodes of other piezoelectric resonator portions. A ladder-type piezoelectric filter, which is one of the communication devices, includes a plurality of parallel resonators and series resonators.
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申请公布号 |
US6867667(B2) |
申请公布日期 |
2005.03.15 |
申请号 |
US20020290499 |
申请日期 |
2002.11.08 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
TAKEUCHI MASAKI;KAWAMURA HIDEKI |
分类号 |
H01L41/09;H01L41/08;H01L41/18;H01L41/22;H03H3/02;H03H3/04;H03H9/02;H03H9/17;H03H9/58;H03H9/60;(IPC1-7):H03H9/205;H03H9/56;H03H9/70 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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