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发明名称
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要
申请公布号
KR100476128(B1)
申请公布日期
2005.03.15
申请号
KR20010065994
申请日期
2001.10.25
申请人
发明人
分类号
C23C16/42;H01L21/205;C23C16/40;C23C16/509;H01L21/312;H01L21/316;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):H01L21/205
主分类号
C23C16/42
代理机构
代理人
主权项
地址
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