| 摘要 |
The present invention provides a head drive unit capable of discharging a required amount of viscous body from a head having a pressure generating element, such as a piezoelectric element, and a method of the same, a droplet discharge unit having the head drive unit, a head drive program, and a device manufacturing method having a process of discharging the viscous body by the method as one of manufacturing processes. In the invention, a driving signal is a signal to be applied to a pressure generating element, such as a piezoelectric element, provided to a head and is generated in synchronization with a clock signal. The driving signal has a period to vary the voltage and a period to hold the voltage. The present invention can vary the rate of change in the voltage of the driving signal per unit time by setting a voltage variation during the period and the number of clocks of the clock signal held in the period as appropriate depending on the rate of deformation of the pressure generating element per unit time.
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