发明名称 |
Digital detector data communication in an optical metrology tool |
摘要 |
A detector network for an optical metrology system includes an analog to digital converter for each photodetector or detector array. Each analog to digital converter is connected to provide digitally encoded output from its associated detector. Each analog to digital converter is also connected to a hub. The hub receives commands from a processor and distributes them to the analog to digital converters. The converters sample the output of their associated detectors and return the digitized results to the hub. In turn, the hub passes the digitized results to the processor for analysis.
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申请公布号 |
US6867870(B1) |
申请公布日期 |
2005.03.15 |
申请号 |
US20020262722 |
申请日期 |
2002.10.02 |
申请人 |
THERMA-WAVE, INC. |
发明人 |
MIHAYLOV MIHAIL;LINDSETH DALE |
分类号 |
G01B11/24;(IPC1-7):G01B11/24 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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