ELEKTROSTATISCHER KRAFTMESSFÜHLER MIT AUSLEGER UND ABSCHIRMUNG

摘要

An electrostatic force microscope for measuring electrostatic force of a sample under test including a detector comprising a cantilever arm having a tip formation at one end and located so that electrostatic force is induced at the tip due to electrostatic charge on the sample under test, an optical system for transforming bending of the cantilever arm due to electrostatic force induced at the tip into an electrical signal containing a frequency component of the electrostatic force induced at the detector tip, a source for applying bias voltage to the detector, a detector for detecting the frequency component of the electrostatic force induced at the detector tip so that a measurement of electrostatic force on the sample under test can be obtained, and an electrostatic shield operatively associated with the cantilever arm. The shield is located between the cantilever arm and the sample under test, in particular in close spaced relation to the arm. The cantilever arm and the shield are maintained at the same electrical potential so that lines of electrostatic force are terminated at the shield.