LINEAR PULSE MOTOR, STAGE APPARATUS, AND EXPOSURE APPARATUS,申请号KR20020014700-传众专利搜索

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发明名称	LINEAR PULSE MOTOR, STAGE APPARATUS, AND EXPOSURE APPARATUS
摘要
申请公布号	KR100476022(B1)	申请公布日期	2005.03.15
申请号	KR20020014700	申请日期	2002.03.19
申请人		发明人
分类号	H02K41/02;G03F7/20;H02K41/03;(IPC1-7):H02K41/02	主分类号	H02K41/02
代理机构		代理人
主权项
地址

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