| 摘要 |
A heat resistance device is provided to manage effectively temperature by dividing a heat treatment part into two or more regions and installing heaters and sensors at the divided regions. A heating unit is used for heating a bottom surface of a target substrate(W). An exhaust part is used for exhausting the heated gases into a top surface of the target substrate. A temperature detection unit detects a temperature of the target substrate. A chilling unit is used for chilling the gases on the basis of the detected temperature. The heating unit includes a cover body for collecting the heated gases. The exhaust part is formed with an exhaust system connected to an exhaust hole at a center of the cover body. The chilling unit is formed with a chiller and a control unit.
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