POWER SUPPLY SYSTEM OF CONTROL APPARATUS USED TO MANUFACTURE SEMICONDUCTOR EQUIPMENT

摘要

A power supply system of a control apparatus for semiconductor manufacturing equipment is provided to supply incessantly power to a PLC(Programmable Logic Controller) regardless of the malfunction of one power supply by using a plurality of power supplies. A power supply system includes a main power supply(124) for supplying predetermined AC(Alternating Current) power to a PLC(151) for controlling a bit of semiconductor manufacturing equipment and a power supply unit. The power supply unit(152) includes a plurality of power supplies(153,154) interposed between the main power supply and the PLC. The power supplies are used for transforming the predetermined AC power into predetermined DC(Direct Current) power and supplying the predetermined DC power to the PLC.