VIBRATION SENSOR

摘要

A vibration sensor is provided to prevent a sensing degree thereof from being degraded and to prevent a vibration diaphragm electrode from being damaged while improving assembling work. A vibration sensor includes a fixed electrode(1). A conical member(2) is installed at a diaphragm surface in opposition to the fixed electrode(1). A vibration diaphragm electrode(3) supporting the conical member(2) is installed at the fixed electrode(1). The vibration sensor outputs a vibration signal of a capacitance between the fixed electrode(1) and the vibration diaphragm electrode(3). A protrusion part(2a) protruding along the diaphragm surface of the vibration diaphragm electrode(3) while maintaining a uniform interval with the vibration diaphragm electrode(3) is partially formed at an end part of the conical member(2).