发明名称 |
SPIN-COATING DEVICE AND METHOD OF PRODUCING DISK-LIKE RECORDING MEDIUM |
摘要 |
A spin-coating device where a mask that is used when a disk is spin-coated can be prevented from being damaged. Specifically, the device is structured as follows. First, a mask is placed on a disk body that is placed on a spinner and is then spin-coated. Immediately after that, processes of washing, rinsing, and drying are continuously applied to the single mask removed from the disk body, and the processed mask is continuously sent to the next process, a spin- coating process.
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申请公布号 |
KR20050025596(A) |
申请公布日期 |
2005.03.14 |
申请号 |
KR20057000278 |
申请日期 |
2005.01.07 |
申请人 |
TDK CORPORATION |
发明人 |
IDEZAWA, SEIICHI;USAMI, MAMORU;USHIDA, TOMOKI;YAMAGUCHI, HARUHIKO;YODOKAWA, YOSHIMI |
分类号 |
G03F7/16;B05B15/04;B05C11/08;B05C11/10;B05D1/00;B05D1/32;B05D1/40;B05D3/10;B05D7/00;G11B7/26;(IPC1-7):B05B15/04 |
主分类号 |
G03F7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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