MEHTOD FOR DESIGNING A MANUFACTURING PROCESS, THE METHOD FOR PROVIDING A MANUFACTURING PROCESS DESIGN AND COMPUTER-AIDED DESIGN SYSTEM

摘要

A method for designing a manufacturing process of an electronic device, and a supporting method and a CAD(Computer Aided Design) system for the same are provided to make design specification for the manufacturing process of the second manufacturing line based on a difference between an electric property of the trial electronic device and a simulated electric property of a trial manufacturing process. An input part(32) obtains design information of the electronic device and manufacturing information of the manufacturing line. A simulation module(34) calculates a device shape or an impurity distribution based on the design and manufacturing information. A display module(36) displays the design and manufacturing information or a simulation result. A specification making module(38) makes the manufacturing process specifications based on the simulation result. An output part(40) outputs the made manufacturing process specification to the manufacturing line. The input part and the output part are connected to the mass or trial manufacturing line, or various databases through the LAN.