发明名称 CHEMICAL SUPPLY BOTTLE FOR REDUCING PRODUCTION COST BY COMPLETE CONSUMPTION OF CHEMICAL AGENT
摘要 PURPOSE: A chemical agent supply bottle is provided to economize a chemical agent through the complete consumption of chemical agent by forming a supplying line of chemical agent at the lower end of a chemical supply bottle. CONSTITUTION: A raised protrusion(60) is formed at the lower end of a chemical supply bottle. A discharge opening(56) for discharging a chemical agent is formed in the center of the protrusion. A chemical supply pipe(58) is formed at the discharge opening. A cover(51) for tightly closing the interior space of the bottle is formed on the top center of the bottle. A purge gas supply pipe(50) is formed at the cover.
申请公布号 KR20050024869(A) 申请公布日期 2005.03.11
申请号 KR20030062094 申请日期 2003.09.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, SUN KYU
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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