发明名称 |
CHEMICAL SUPPLY BOTTLE FOR REDUCING PRODUCTION COST BY COMPLETE CONSUMPTION OF CHEMICAL AGENT |
摘要 |
PURPOSE: A chemical agent supply bottle is provided to economize a chemical agent through the complete consumption of chemical agent by forming a supplying line of chemical agent at the lower end of a chemical supply bottle. CONSTITUTION: A raised protrusion(60) is formed at the lower end of a chemical supply bottle. A discharge opening(56) for discharging a chemical agent is formed in the center of the protrusion. A chemical supply pipe(58) is formed at the discharge opening. A cover(51) for tightly closing the interior space of the bottle is formed on the top center of the bottle. A purge gas supply pipe(50) is formed at the cover.
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申请公布号 |
KR20050024869(A) |
申请公布日期 |
2005.03.11 |
申请号 |
KR20030062094 |
申请日期 |
2003.09.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, SUN KYU |
分类号 |
H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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