Micro manufactured gyrometer angular speed detector having thin plate with two mobile symmetric assemblies coupling structure coupled and moving sections allowing different plane vibration/fixed anchorage section

摘要

The vibrating gyrometer structure is manufactured on a thin plate by micro manufacture. The gyrometer has two mobile symmetric assemblies (30,10,50) coupled by a coupling structure (20) allowing mechanical energy transfer. There are three moving sections allowing vibration in different planes with fixed anchorage zones (34,36) and connection zone (12,14).