发明名称 VACUUM CONTAINER
摘要 PROBLEM TO BE SOLVED: To provide a vacuum container which allows the size/weight of its cover and the total cost including the maintainability to be reduced. SOLUTION: The vacuum container 10 comprises a frame 11 having an opening at the top end and an openable cover 12 for sealing the interior from the top end opening of the frame 11. The cover 12 is divided into a first and second cover members 12A, 12B and has a seal-assisting member 18 between the cover members 12A, 12B and the top end face 11A of the frame 11. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005064213(A) 申请公布日期 2005.03.10
申请号 JP20030291989 申请日期 2003.08.12
申请人 TOKYO ELECTRON LTD 发明人 OKABE SEIJI
分类号 H01L21/677;C23C14/22;C23F4/00;H01L21/00;H01L21/18;H01L21/3065;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
代理机构 代理人
主权项
地址