发明名称 METHOD OF MANUFACTURING BN-AlN-BASED COMPOSITE SINTERED COMPACT
摘要 <P>PROBLEM TO BE SOLVED: To easily manufacture a BN-AlN-based composite sintered compact with less light gray parts and less color unevenness regions. <P>SOLUTION: The BN-AlN-based composite sintered compact is manufactured by filling a die with a mixed powder A containing boron nitride, aluminum nitride, and aluminum, around which a mixed powder B containing the same components but with a higher content of aluminum than the mixed powder A is placed, and sintering by a hot press. Preferably, the aluminum content of the mixed powder B is 6-25 mass % and by &ge;3 mass % higher than that of the mixed powder A. The thickness of the mixed powder B is preferably 5-20 mm. Hot press sintering at 1,700-2,300&deg;C under pressure of 5-40 MPa is preferable. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005060178(A) 申请公布日期 2005.03.10
申请号 JP20030293773 申请日期 2003.08.15
申请人 DENKI KAGAKU KOGYO KK 发明人 NISHIKAWA MASATO;FUSHII YASUTO;HIRASHIMA YUTAKA
分类号 C04B35/581;H01L23/12 主分类号 C04B35/581
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