| 摘要 |
<P>PROBLEM TO BE SOLVED: To drive so as not to put load to a servo control system and the control system of an electromagnetic joint, when allowing the electromagnetic joint to generate thrust and positioning is performed, using an actuator. <P>SOLUTION: A positioning apparatus has a stage 1, which is movable on a surface plate; a table 2 which is provided on the stage 1 and is movable with holding a target object for positioning; an actuator 3 which is used for positioning the stage 1; and an actuator 4 which is used for positioning of the table 2. In addition, the positioning apparatus has an electromagnetic joint 5, disposed in between the stage 1 and the table 2 to generate thrust to be given to the table 2; a controller 6 which performs servo control for the table 2; and a magnetic flux control system 7 which controls magnetic flux of the electromagnetic joint 5. The time function of the acceleration instruction value for the table 2 and the square root of the time function are made to be continuous differentially continuous. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
