| 摘要 |
PROBLEM TO BE SOLVED: To enable electrically detecting deposits deposited on the surface of a film heater 1; to enable grasping the thickness of the deposits whenever necessary; and to exactly obtain maintenance information such as the necessity of prevention of the increase of the deposits or elimination of the deposits. SOLUTION: The film heater 1 comprises the film shape of a heater element 3 consisting of a patterned conductor film that is laminated by insulating films 2, 7 with heat resistance and has flexibility. The heater includes electrostatic capacity electrodes 4a, 4b acquiring capacitance facing the surface direction of the film or the thickness direction thereof, and detects the deposits adhered to the surface of the film by the capacity acquired by the electrostatic capacity electrodes 4a, 4b. For example, the electrostatic capacity electrodes 4a, 4b are formed together with the heater element 3, and are laminated by the insulating films 2, 7. In this case, the electrostatic capacity electrodes 4a, 4b face the surface direction of the film heater 1 to acquire the capacity. COPYRIGHT: (C)2005,JPO&NCIPI
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