Vaporize for thin film deposition apparatus,申请号KR20020041980-传众专利搜索

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发明名称	Vaporize for thin film deposition apparatus
摘要
申请公布号	KR100474970(B1)	申请公布日期	2005.03.10
申请号	KR20020041980	申请日期	2002.07.18
申请人		发明人
分类号	C23C16/455;C23C16/448;(IPC1-7):C23C16/455	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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