| 摘要 |
PROBLEM TO BE SOLVED: To make it easy to deliver a substrate between an alignment station and an exposure station without complicating the structure of a device. SOLUTION: The substrate holding device sucks and holds a substrate 2 by a negative pressure, and it is provided with a main body 3, a suction hole 37 that is formed in the main body 3 to suck an open air, and a first hollow part 35 that is formed inside the main body 3 and is communicated with the suction hole 37. COPYRIGHT: (C)2005,JPO&NCIPI |
