| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device and a polished surface observing method using this where observation working efficiency does not so decrease even when repeating of polishing and observation of the polished member is diligently performed, the focal distance of a microscope may be constant, and the space is not taken. SOLUTION: The polishing device 1A is constituted by arranging the microscope 23 facing a moving back position of the polishing surface Ws of a polishing member W in a hollow rotary shaft 4A of the polishing member W and connecting a monitor 24 to the microscope 23. COPYRIGHT: (C)2005,JPO&NCIPI
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