| 摘要 |
PROBLEM TO BE SOLVED: To provide a position measuring device allowing improvement in the quality of the output signal of a detection device. SOLUTION: This position measuring device has measurement graduations, extending in a measurement direction; a scanning unit for scanning the measurement graduations; and the detection device of the scanning unit. The detection device has a large number of detection elements disposed periodically in the extending direction. The detection element generates the output signal suppliable to an estimation unit, when scanning the measurement graduations, and the plurality of detection elements adjacent to each other are unified to form a detection group. Thereby, the output signals of the detection elements are gathered together and can be supplied to the estimation unit as a unified signal. The detection elements E are unified into the detection groups G1, G2, G3, G4 such that at least one prescribed harmonic is removed from the output signal, and the detection groups G1, G2, G3, G4 are arranged side by side in the extension direction R. COPYRIGHT: (C)2005,JPO&NCIPI
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