| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of unitarily managing the quality of composite glass substrates after chemical polishing. SOLUTION: A liquid crystal display substrate LCD, formed by pasting a plurality of glass substrates, in a semi-finish state is chemically polished, and then its quality is inspected in an inspection apparatus EQU. The inspection apparatus EQU is provided with both a light projecting part 1 for irradiation with band-like laser light BM extended over a light shielding film of the liquid crystal display substrate and a light receiving part 2 for receiving reflected waves from the liquid crystal display substrate. On the basis of data on inspection ranges AR<SB>A</SB>and AR<SB>B</SB>set in an initial state among two-dimensional data acquire from a two-dimensional image sensor 8 arranged in the light receiving part 2, the plate thickness of the liquid crystal display substrate is determined. COPYRIGHT: (C)2005,JPO&NCIPI
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