METHOD OF FORMING OPTICAL IMAGES, AN ARRAY OF CONVERGING ELEMENTS AND AN ARRAY OF LIGHT VALVES FOR USE IN THIS METHOD, APPARATUS FOR CARRYING OUT THIS METHOD AND A PROCESS FOR MANUFACTURING A DEVICE USING THIS METHOD

摘要

A maskless lithography method and apparatus, whereby corresponding sets of light valves (7) and radiation-converging elements (17) are provided between a radiation source and a radiation-sensitive layer (3). Each converging element corresponds to a different one of the light valves (7) and serves to converge radiation from the corresponding light valve (7) in a spot area in the radiation-sensitive layer (3). Each light valve (7) can be switched between an on and off state in dependence upon the image to be written in the radiation-sensitive layer (3) by the light valve (7). The light converging elements (17) are provided in a single, unitary optical element, and arranged in a single row substantially equal to or greater than the width or length of the radiation-sensitive layer (3).