DEVELOPER-SOLUBLE METAL ALKOXIDE COATINGS FOR MICROELECTRONIC APPLICATIONS,申请号KR20047021093-传众专利搜索

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发明名称	DEVELOPER-SOLUBLE METAL ALKOXIDE COATINGS FOR MICROELECTRONIC APPLICATIONS
摘要
申请公布号	KR20050024385(A)	申请公布日期	2005.03.10
申请号	KR20047021093	申请日期	2003.06.18
申请人		发明人
分类号	G03F7/11;G03F7/26;C08G79/00;C08G79/10;C08L85/00;G03F7/09;H01L21/027;(IPC1-7):G03F7/26	主分类号	G03F7/11
代理机构		代理人
主权项
地址

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